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Stepper based maskless microlithography using a liquid crystal display for massively parallel direct-write of binary and multilevel microstructures

Abstract : A versatile photolithographic photoplotter based on a standard photoreduction stepper where the reticle is replaced by a commercial liquid crystal microdisplay is reported. The microdisplay module is designed as a drop-in replacement allowing the photoplotter to be simply and quickly converted into a standard stepper making it an extremely versatile, low cost R&D tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1 micron feature sizes into standard industrial photoresists. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.
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Melanie Kessels, Marwa El Bouz, Robin Pagan, Kevin Heggarty. Stepper based maskless microlithography using a liquid crystal display for massively parallel direct-write of binary and multilevel microstructures. Journal of Micro/Nanolithography, MEMS, and MOEMS, Society of Photo-optical Instrumentation Engineers, 2007, 6 (3), pp.033002. ⟨10.1117/1.2767331⟩. ⟨hal-01974805⟩

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