Melanie Kessels, Marwa El Bouz, Robin Pagan, Kevin Heggarty. Stepper based maskless microlithography using a liquid crystal display for massively parallel direct-write of binary and multilevel microstructures.
Journal of Micro/Nanolithography, MEMS, and MOEMS, Society of Photo-optical Instrumentation Engineers, 2007, 6 (3), pp.033002.
⟨10.1117/1.2767331⟩.
⟨hal-01974805⟩