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Stepper based maskless microlithography using a liquid crystal display for massively parallel direct-write of binary and multilevel microstructures
Abstract : A versatile photolithographic photoplotter based on a standard photoreduction stepper where the reticle is replaced by a commercial liquid crystal microdisplay is reported. The microdisplay module is designed as a drop-in replacement allowing the photoplotter to be simply and quickly converted into a standard stepper making it an extremely versatile, low cost R&D tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1 micron feature sizes into standard industrial photoresists. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.
Cited literature [30 references]
https://hal-imt-atlantique.archives-ouvertes.fr/hal-01974805
Contributor : Kevin Heggarty <>
Submitted on : Wednesday, January 9, 2019 - 8:36:51 AM
Last modification on : Tuesday, January 5, 2021 - 11:44:02 AM
Contributor : Kevin Heggarty <>
Submitted on : Wednesday, January 9, 2019 - 8:36:51 AM
Last modification on : Tuesday, January 5, 2021 - 11:44:02 AM
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JM3_Article_MPP.pdf
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