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Proximity effect in parallelized microfabrication using two-photon polymerization

Luis Adrian Pérez Covarrubias 1 Caroline Arnoux 2 Quentin Carlier 1 Alexandre Khaldi 1 Patrice Baldeck 2 Kevin Heggarty 1 
1 IMT Atlantique - OPT - Département Optique
2 UCBL - Université Claude Bernard Lyon 1
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https://hal-imt-atlantique.archives-ouvertes.fr/hal-03104071
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Submitted on : Wednesday, May 26, 2021 - 5:27:14 PM
Last modification on : Friday, August 5, 2022 - 2:54:52 PM
Long-term archiving on: : Friday, August 27, 2021 - 8:41:09 PM

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INSTITUT-TELECOM | UNIV-LYON1 | IMT-ATLANTIQUE | UDL

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Luis Adrian Pérez Covarrubias, Caroline Arnoux, Quentin Carlier, Alexandre Khaldi, Patrice Baldeck, et al.. Proximity effect in parallelized microfabrication using two-photon polymerization. SPIE Photonics Europe 2020, Apr 2020, Online Only, France. pp.26, ⟨10.1117/12.2555377⟩. ⟨hal-03104071⟩

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