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Proximity effect in parallelized microfabrication using two-photon polymerization

Luis Adrian Pérez Covarrubias Caroline Arnoux Quentin Carlier Alexandre Khaldi Patrice Baldeck Kevin Heggarty 1
1 IMT Atlantique - OPT - Département Optique
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https://hal-imt-atlantique.archives-ouvertes.fr/hal-03104071
Contributor : Kevin Heggarty <>
Submitted on : Friday, January 8, 2021 - 4:00:44 PM
Last modification on : Sunday, January 10, 2021 - 3:04:11 AM

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IMT-ATLANTIQUE | INSTITUT-TELECOM

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Luis Adrian Pérez Covarrubias, Caroline Arnoux, Quentin Carlier, Alexandre Khaldi, Patrice Baldeck, et al.. Proximity effect in parallelized microfabrication using two-photon polymerization. 3D Printed Optics and Additive Photonic Manufacturing II, Apr 2020, Online Only, France. pp.26, ⟨10.1117/12.2555377⟩. ⟨hal-03104071⟩

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