Screen Printing on Low Temperature Cofired Ceramics

Camilla Kärnfelt (1, 2) , Nicolas Ryon (1)

1 IMT Atlantique - MO - Département Micro-Ondes
2 Lab-STICC_DH - Equipe Dispositifs Hyperfréquences

In order to improve screen printing quality of gold paste onto LTCC tape, an experimental design has been performed. The tested parameters, related to the EKRA M2H screen printer, are squeegee pressure, squeegee speed and snap off distance. Line widths and gaps sizes of 75, 100 and 150 µm were printed and optically measured in green state. The best setting, 30-45 bar squeegee pressure, 25 mm/s print speed and 0.7 mm snap off distance, results in an oversize of line widths and an undersize of gaps in the order of 15-19 µm.

Mots clés: Screen printing; Low Temperature Cofired Ceramics (LTCC); pressure; snap off; print speed

Domaines: Micro et nanotechnologies/Microélectronique

Camilla Kärnfelt, Nicolas Ryon. Screen Printing on Low Temperature Cofired Ceramics. 44 th International Microelectronics and Packaging conference, Apr 2021, Online, Poland. ⟨hal-03669947⟩